Actuator, optical scanner, and image forming apparatus

ABSTRACT

An actuator including a movable portion that swings about a swing axis, a connecting portion that extends from the movable portion and torsionally deforms in response to the swinging of the movable portion, and a support portion that supports the connecting portion, wherein the movable portion is so shaped that the length thereof parallel to the swing axis decreases stepwise with distance from the swing axis in a plan view, and the movable portion, the support portion, and the connecting portion are formed by anisotropically etching a silicon substrate.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a continuation patent application of U.S. application Ser. No.13/442,318 filed Apr. 9, 2012, which claims priority to Japanese PatentApplication No. 2011-087764, filed Apr. 11, 2011, all of which areexpressly incorporated by reference herein in their entireties.

BACKGROUND

1. Technical Field

The present invention relates to an actuator, an optical scanner, and animage forming apparatus.

2. Related Art

An actuator using a torsional oscillator has been known (seeJP-A-2010-79243, for example).

For example, JP-A-2010-79243 discloses an optical deflector including amovable plate (movable portion), a support frame (support portion), anda pair of elastic support portions (connecting portions) thattorsionally and pivotally (swingably) support the movable plate relativeto the support frame, and each of the elastic support portions is formedof two bars (beam members).

The movable plate, the support frame, and the pair of elastic supportportions are formed integrally with each other by anisotropicallyetching a silicon substrate having silicon (100) principal surfaces.

Further, in the optical deflector according to JP-A-2010-79243, themovable plate has an octagonal shape in a plan view. The movable platehaving an octagonal shape in a plan view is advantageous in that theweight of portions of the movable plate that are apart from a pivotal(swing) axis and hence the moment of inertia are reduced.

The movable plate having an octagonal shape in a plan view is, however,problematic in that the shape is difficult to manufacture. Inparticular, when a movable plate of this type is manufactured by usinganisotropic etching as described above, the combination of anisotropicetching and the crystal surface of the movable plate makes it difficultto control the shape of the movable plate, disadvantageously resultingin large variation in the shape.

SUMMARY

An advantage of some aspects of the invention is to provide an actuator,an optical scanner, and an image forming apparatus including a movableportion manufacturable with a smaller amount of variation in the shapethereof than in related art and having a small moment of inertia at thetime of pivotal (swing) motion.

An aspect of the invention is directed to a actuator including a movableportion that swings about a swing axis, a connecting portion thatextends from the movable portion and torsionally deforms in response tothe swinging of the movable portion, and a support portion that supportsthe connecting portion, wherein the movable portion is so shaped thatthe length thereof parallel to the swing axis decreases stepwise withdistance from the swing axis in a plan view, and the movable portion,the support portion, and the connecting portion are formed byanisotropically etching a silicon substrate.

The actuator according to the aspect of the invention includes a movableportion manufacturable with a small amount of variation in the shapethereof and having a small moment of inertia at the time of theswinging.

In the actuator according to the aspect of the invention, the length ofthe movable portion parallel to the swing axis preferably decreases intwo steps with distance from the axis in the plan view.

The thus shaped movable portion has an area and a thickness that allowsthe movable portion to pivot at a resonance frequency (ranging from 4 to40 kHz), which is suitable for optical scanning, with dynamic distortionsuppressed.

In the actuator according to the aspect of the invention, the movableportion preferably has an outer shape in the plan view that is formedprimarily of a line segment parallel to the swing axis and a linesegment perpendicular to the swing axis.

The thus shaped movable portion described above allows variation in theshape thereof in a manufacturing process to be reduced.

In the actuator according to the aspect of the invention, each platesurface of the movable portion is preferably formed of a silicon (100)surface.

Anisotropically etching a silicon substrate having silicon (100) platesurfaces allows the variation in the shape of the movable portion to bereduced and the movable portion, the support portion, and the connectingportion to be readily formed.

In the actuator according to the aspect of the invention, a side surfaceof the movable portion is preferably primarily formed of a silicon (111)surface.

Anisotropically etching a silicon substrate having silicon (100) platesurfaces and using the silicon (111) surface as an etching stop layerallow the variation in the shape of the movable portion to be reducedand the movable portion, the support portion, and the connecting portionto be readily formed.

In the above actuator according to the aspect of the invention, a groovehaving a V-like shape in a cross-sectional view taken along a planeperpendicular to plate surfaces of the movable portion is preferablyformed in the side surface of the movable portion.

The moment of inertia of the movable portion can therefore be reduced.Further, the groove described above can be readily formed byanisotropically etching a silicon substrate having silicon (100) platesurfaces and using the silicon (111) surface as an etching stop layer toreduce variation in the shape of the groove.

In the actuator according to the aspect of the invention, surfaces ofthe connecting portion are preferably formed of the silicon (100)surface and the silicon (111) surface.

The configuration described above allows variation in the shape of theconnecting portion to be reduced and the connecting portion to bereadily formed by using the silicon (111) surface as an etching stoplayer.

In the actuator according to the aspect of the invention, the movableportion preferably has a shape symmetric with respect to the swing axisin the plan view.

The symmetric shape of the movable portion allows the center of gravitythereof to be positioned on the swing axis thereof, whereby the movableportion smoothly pivots.

In the above actuator according to the aspect of the invention, themovable portion preferably has a shape symmetric with respect to a linepassing through a center of the movable portion and perpendicular to theswing axis in the plan view.

The movable portion can therefore be readily designed.

Another aspect of the invention is directed to an actuator including amovable portion that swings about a swing axis, a connecting portionthat extends from the movable portion and torsionally deforms inresponse to the swinging of the movable portion, and a support portionthat supports the connecting portion, wherein the movable portion has arectangular outer shape having sides formed of line segments parallel tothe swing axis, sides formed of line segments perpendicular to the swingaxis, and four truncated corners in a plan view, each of the truncatedportions having a stepped outer shape obtained by alternately connectinga line segment parallel to the swing axis and a line segmentperpendicular to the swing axis, and the movable portion, the supportportion, and the connecting portion are formed by anisotropicallyetching a silicon substrate.

The actuator according to the aspect of the invention includes a movableportion manufacturable with a small amount of variation in the shapethereof and having a small moment of inertia at the time of theswinging.

Still another aspect of the invention is directed to an actuatorincluding a movable portion that swings about a swing axis, a connectingportion that extends from the movable portion and torsionally deforms inresponse to the swinging of the movable portion, and a support portionthat supports the connecting portion, wherein the movable portion has astepped outer shape having a plurality of angled portions at each offour corners in a plan view, and the movable portion, the supportportion, and the connecting portion are formed by anisotropicallyetching a silicon substrate.

The actuator according to the aspect of the invention includes a movableportion manufacturable with a small amount of variation in the shapethereof and having a small moment of inertia at the time of theswinging.

Yet another aspect of the invention is directed to an optical scannerincluding a movable portion that includes a light reflector having lightreflectivity and swings about a swing axis, a connecting portion thatextends from the movable portion and torsionally deforms in response tothe swinging of the movable portion, and a support portion that supportsthe connecting portion, wherein the movable portion is so shaped thatthe length thereof parallel to the swing axis decreases stepwise withdistance from the swing axis in a plan view, and the movable portion,the support portion, and the connecting portion are formed byanisotropically etching a silicon substrate.

The thus configured optical scanner includes a movable portionmanufacturable with a small amount of variation in the shape thereof andhaving a small moment of inertia at the time of the swinging.

Still yet another aspect of the invention is directed to an opticalscanner including a movable portion that includes a light reflectorhaving light reflectivity and swings about a swing axis, a connectingportion that extends from the movable portion and torsionally deforms inresponse to the swinging of the movable portion, and a support portionthat supports the connecting portion, wherein the movable portion has arectangular outer shape having sides formed of line segments parallel tothe swing axis, sides formed of line segments perpendicular to the swingaxis, and four truncated corners in a plan view, each of the truncatedportions having a stepped outer shape obtained by alternately connectinga line segment parallel to the swing axis and a line segmentperpendicular to the swing axis, and the movable portion, the supportportion, and the connecting portion are formed by anisotropicallyetching a silicon substrate.

The thus configured optical scanner includes a movable portionmanufacturable with a small amount of variation in the shape thereof andhaving a small moment of inertia at the time of the swinging.

Further another aspect of the invention is directed to an opticalscanner including a movable portion that includes a light reflectorhaving light reflectivity and swings about a swing axis, a connectingportion that extends from the movable portion and torsionally deforms inresponse to the swinging of the movable portion, and a support portionthat supports the connecting portion, wherein the movable portion has astepped outer shape having a plurality of angled portions at each offour corners in a plan view, and the movable portion, the supportportion, and the connecting portion are formed by anisotropicallyetching a silicon substrate.

The thus configured optical scanner includes a movable portionmanufacturable with a small amount of variation in the shape thereof andhaving a small moment of inertia at the time of the swinging.

Still further another aspect of the invention is directed to an imageforming apparatus including a light source that emits light, and anoptical scanner that deflects light from the light source, wherein theoptical scanner includes a movable portion that includes a lightreflector having light reflectivity and swings about a swing axis, aconnecting portion that extends from the movable portion and torsionallydeforms in response to the swinging of the movable portion, and asupport portion that supports the connecting portion, the movableportion is so shaped that the length thereof parallel to the swing axisdecreases stepwise with distance from the swing axis in a plan view, andthe movable portion, the support portion, and the connecting portion areformed by anisotropically etching a silicon substrate.

The thus configured image forming apparatus includes a movable portionmanufacturable with a small amount of variation in the shape thereof andhaving a small moment of inertia at the time of the swinging, whereby ahigh-quality image can be produced at a low cost.

Yet further another aspect of the invention is directed to an imageforming apparatus including a light source that emits light, and anoptical scanner that deflects light from the light source, wherein theoptical scanner includes a movable portion including a light reflectorhaving light reflectivity and swings about a swing axis, a connectingportion that extends from the movable portion and torsionally deforms inresponse to the swinging of the movable portion, and a support portionthat supports the connecting portion, the movable portion has arectangular outer shape having sides formed of line segments parallel tothe swing axis, sides formed of line segments perpendicular to the swingaxis, and four truncated corners in a plan view, each of the truncatedportions having a stepped outer shape obtained by alternately connectinga line segment parallel to the swing axis and a line segmentperpendicular to the swing axis, and the movable portion, the supportportion, and the connecting portion are formed by anisotropicallyetching a silicon substrate.

The thus configured image forming apparatus includes a movable portionmanufacturable with a small amount of variation in the shape thereof andhaving a small moment of inertia at the time of the swinging, whereby ahigh-quality image can be produced at a low cost.

Still yet further another aspect of the invention is directed to animage forming apparatus including a light source that emits light, andan optical scanner that deflects light from the light source, whereinthe optical scanner includes a movable portion that includes a lightreflector having light reflectivity and swings about a swing axis, aconnecting portion that extends from the movable portion and torsionallydeforms in response to the swinging of the movable portion, and asupport portion that supports the connecting portion, the movableportion has a stepped outer shape having a plurality of angled portionsat each of four corners in a plan view, and the movable portion, thesupport portion, and the connecting portion are formed byanisotropically etching a silicon substrate.

The thus configured image forming apparatus includes a movable portionmanufacturable with a small amount of variation in the shape thereof andhaving a small moment of inertia at the time of the swinging, whereby ahigh-quality image can be produced at a low cost.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be described with reference to the accompanyingdrawings, wherein like numbers reference like elements.

FIG. 1 is a plan view showing an optical scanner (actuator) according toa first embodiment of the invention.

FIG. 2 is a cross-sectional view taken along the line A-A shown in FIG.1.

FIG. 3 is a plan view for describing a movable plate provided in theoptical scanner shown in FIG. 1.

FIG. 4 is a cross-sectional view taken along the line B-B shown in FIG.1.

FIG. 5 is a partial enlarged cross-sectional view showing part of FIG.4.

FIGS. 6A to 6G are cross-sectional views for describing a method formanufacturing the optical scanner shown in FIG. 1.

FIGS. 7A to 7G are cross-sectional views for describing the method formanufacturing the optical scanner shown in FIG. 1.

FIGS. 8A to 8G are cross-sectional views for describing the method formanufacturing the optical scanner shown in FIG. 1.

FIG. 9 is a partial enlarged plan view showing the movable plate afteran etching step shown in FIG. 8E.

FIG. 10 is a partial enlarged plan view showing a mask used in theetching step shown in FIG. 8E.

FIGS. 11A to 11D describe formation of a connecting portion in theetching step (when no mask shift occurs) shown in FIG. 8E.

FIGS. 12A to 12D describe the formation of the connecting portion in theetching step (when mask shift occurs) shown in FIG. 8E.

FIG. 13 is a plan view showing an optical scanner according to a secondembodiment of the invention.

FIG. 14 is a partial enlarged cross-sectional view taken along the lineB-B shown in FIG. 13.

FIG. 15 is a plan view for describing a movable plate provided in anoptical scanner according to a third embodiment of the invention.

FIG. 16 is a plan view for describing a movable plate provided in anoptical scanner according to a fourth embodiment of the invention.

FIG. 17 is a plan view for describing a movable plate provided in anoptical scanner according to a fifth embodiment of the invention.

FIG. 18 is a schematic view showing an example of the configuration ofan image forming apparatus according to an embodiment of the invention.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

An actuator, an optical scanner, and an image forming apparatusaccording to preferred embodiments of the invention will be describedbelow with reference to the accompanying drawings. The followingdescription will be made with reference to a case where the actuatoraccording to each of the preferred embodiments of the invention is usedas an optical scanner.

First Embodiment

An optical scanner according to a first embodiment of the invention willfirst be described.

FIG. 1 is a plan view showing the optical scanner (actuator) accordingto the first embodiment of the invention. FIG. 2 is a cross-sectionalview taken along the line A-A shown in FIG. 1. FIG. 3 is a plan view fordescribing a movable plate provided in the optical scanner shown inFIG. 1. FIG. 4 is a cross-sectional view taken along the line B-B shownin FIG. 1. FIG. 5 is a partial enlarged cross-sectional view showingpart of FIG. 4. In the following sections, the upper side and the lowerside in FIGS. 2 and 4, 5, 6A to 6G, 7A to 7G, and 8A to 8G are referredto as “up” and “down,” respectively, for ease of description.

An optical scanner 1 includes a base 2 having an oscillatory system, asupport 3 that supports the base 2, and a driver 4 that oscillates theoscillatory system of the base 2, as shown in FIG. 1.

The base 2 includes a movable plate (movable portion) 21 having a lightreflector 211 provided thereon, a pair of connecting portions 23 and 24connected to the movable plate 21, and a support portion 22 thatsupports the pair of connecting portions 23 and 24. In other words, thesupport portion 22 supports the movable plate 21 via the connectingportions 23 and 24, and the pair of connecting portions 23 and 24connect the movable plate 21 to the support portion 22.

In the thus configured optical scanner 1, the driver 4 produces a driveforce that causes the movable plate 21 to pivot (swing) about apredetermined axis (pivotal central axis) extending along the connectingportions 23 and 24 with the connecting portions 23 and 24 torsionallydeformed. Light reflected off the light reflector 211 is thus deflectedalong a single predetermined direction.

The components that form the optical scanner 1 will be sequentiallydescribed below in detail.

Base

The base 2 includes the movable plate 21, on which the light reflector211 is provided, the support portion 22, which supports the movableplate 21, and the pair of connecting portions 23 and 24, which connectthe movable plate 21 to the support portion 22, as described above.

The base 2 is primarily made of silicon, and the movable plate 21, thesupport portion 22, and the connecting portions 23 and 24 are formedintegrally with each other. More specifically, the base 2 is formed byanisotropically etching a silicon substrate having silicon (100) platesurfaces, as will be described later in detail. When anisotropic etchingis performed as described above, a silicon (111) surface works as anetching stop layer, whereby the movable plate 21, the support portion22, and the pair of connecting portions 23 and 24 can be readily formedwith precision. The silicon substrate is typically formed of a singlecrystal silicon substrate.

Each of the upper and lower surfaces of the base 2 is the silicon (100)surface, and each of the inner circumferential surface of the supportportion 22, the side surface of the movable plate 21, and the sidesurfaces of the connecting portions 23 and 24 that are parallel to anaxial line X is the silicon (111) surface.

Since silicon is as light and rigid as SUS, the base 2 primarily made ofsilicon has excellent oscillation characteristics. Further, sincesilicon can be etched with high dimensional precision, as will bedescribed later, the base 2 formed of a silicon substrate can be etchedinto a desired shape (shaped to have desired oscillationcharacteristics).

The base 2 will be further described below in detail.

The support portion 22 has a frame-like shape, as shown in FIG. 1. Morespecifically, the support portion 22 has an annularly rectangular shape.The thus shaped support portion 22 supports the movable plate 21 via thepair of connecting portions 23 and 24. The shape of the support portion22 is not limited to a specific one and may be any shape that cansupport the movable plate 21 via the pair of connecting portions 23 and24. For example, the support portion 22 may be divided in correspondencewith the connecting portions 23 and 24.

The movable plate 21 is disposed inside the thus shaped support portion22.

The movable plate 21 has a plate-like shape. In the present embodiment,the movable plate 21 has an outer shape having stepped four cornersabout the center P of the movable plate 21 in a plan view along thethickness direction thereof. Each of the stepped outer portions includesa plurality of angled portions, five angled portions per corner in thepresent embodiment. The shape of the movable plate 21 not only ensures asufficient area (light reflecting region) of the light reflector 211 onthe upper surface of the movable plate 21 but also reduces the moment ofinertia of the movable plate 21 at the time of pivotal motion. Further,the thus shaped movable plate 21 can be readily formed with precision byanisotropically etching a silicon substrate, as will be described laterin detail.

In other words, the movable plate 21 has a rectangular outer shapehaving sides formed of line segments parallel to the pivotal centralaxis (swing axis, axial line X), sides formed of line segmentsperpendicular to the pivotal central axis, and four truncated corners ina plan view along the thickness direction. Each of the truncatedportions (251, 252, 253, and 254) has a stepped outer shape obtained byalternately connecting a line segment parallel to the pivotal centralaxis and a line segment perpendicular thereto.

In still other words, the movable plate 21 is so shaped that the length(width) thereof parallel to the pivotal central axis (axial line X)decreases stepwise with distance from the axial line X in the plan viewviewed along the thickness direction. The terms “stepwise” and“continuously” used herein are expressions having opposite meanings, andthe former means that the length (width) of the movable plate 21discretely changes in the present embodiment.

The outer edge of the movable plate 21 can thus be as similar aspossible to the outer edge of the spot of light L incident on the lightreflector 211, whereby the light reflecting region of the movable plate21 can be efficiently ensured.

More specifically, the movable plate 21 includes a main body 212, a pairof protrusions (second protrusions) 213 and 214 that protrude from themain body 212 in opposite directions parallel to the axial line X, and apair of protrusions (first protrusions) 215 and 216 that protrude fromthe main body 212 in opposite directions perpendicular to the axial lineX, as shown in FIG. 3.

The truncated portion 251 is formed between the protrusion 213 and theprotrusion 215 along the outer edge of the movable plate 21. Similarly,the truncated portion 252 is formed between the protrusion 213 and theprotrusion 216 along the outer edge of the movable plate 21. Thetruncated portion 254 is formed between the protrusion 214 and theprotrusion 216 along the outer edge of the movable plate 21. Thetruncated portion 253 is formed between the protrusion 214 and theprotrusion 215 along the outer edge of the movable plate 21.

In other words, the truncated portion 251, the protrusion 213, thetruncated portion 252, the protrusion 216, the truncated portion 254,the protrusion 214, the truncated portion 253, and the protrusion 215are arranged in this order along the outer edge of the movable plate 21(main body 212) in a plan view.

Further, the truncated portion 251 and the truncated portion 252 faceeach other with the protrusion 213 therebetween. The truncated portion252 and the truncated portion 254 face each other with the protrusion216 therebetween. The truncated portion 253 and the truncated portion254 face each other with the protrusion 214 therebetween. The truncatedportion 251 and the truncated portion 253 face each other with theprotrusion 215 therebetween.

The movable plate 21 at each of truncated portions 251 to 254 has astepped outer shape alternately extending in the direction perpendicularto the pivotal central axis of the movable plate 21 (hereinafter alsoreferred to as “along line Y”) and in the direction parallel to thepivotal central axis (axial line X) of the movable plate 21 (hereinafteralso referred to as “along axial line X”) in the plan view along thethickness direction.

The movable plate 21 thus has a rectangular outer shape having sidesformed of line segments parallel to the pivotal central axis, sidesformed of line segments perpendicular thereto, and four truncatedcorners in the plan view along the thickness direction, and each of thetruncated portions has a stepped outer shape obtained by alternatelyconnecting a line segment parallel to the pivotal central axis and aline segment perpendicular thereto, as described above.

The movable plate 21 is therefore so shaped that the length (width)along the axial line X decreases stepwise with distance from the centertoward both ends along the line Y in the plan view viewed along thethickness direction. Further, the movable plate 21 is so shaped that thelength (width) along the line Y decreases stepwise with distance fromthe center toward both ends along the axial line X direction in the planview viewed along the thickness direction.

Each of the angled portions at each of the stepped outer portions of themovable plate 21 described above may not have an exact right angle insome cases because a plurality of crystal surfaces are present. Further,the angled portions described above may be rounded in a roundingprocess. In the present embodiment, each of the corners is considered tohave the stepped shape described above even when each angled portiondoes not have an exact right angle or is rounded, and the length (width)of the movable plate 21 is considered to change stepwise.

In the present embodiment, each of the four corners of the movable plate21 has a two-step stepped shape in the plan view along the thicknessdirection. In other words, the length (width) of the movable plate 21along the axial line X decreases stepwise in two steps with distancefrom the center toward both ends along the line Y in the plan viewviewed along the thickness direction. As a result, the length (width) ofthe movable plate 21 along the axial line X has three values. The length(width) of the movable plate 21 along the line Y also decreases stepwisein two steps with distance from the center toward both ends along theaxial line X in the plan view viewed along the thickness direction. As aresult, the length (width) of the movable plate 21 along the line Y hasthree values. The thus shaped movable plate 21 has an area and athickness that allow the movable plate 21 to pivot at a resonancefrequency (ranging from 4 to 40 kHz), which is suitable for opticalscanning, with dynamic distortion suppressed.

Each of the protrusions 213 and 214 of the thus shaped movable plate 21has a width a2 along the line Y direction, which is smaller than a widtha1 of the main body 212 along the line Y. Further, each of theprotrusions 215 and 216 has a width b2 along the axial line X, which issmaller than a width b1 of the main body 212 along the axial line X.

In the present embodiment, a1 and b1 are equal to each other and a2 andb2 are equal to each other. Alternatively, a1 and b1 may differ fromeach other and a2 and b2 may differ from each other.

The outer shape of the movable plate 21 in the plan view along thethickness direction is primarily formed of line segments parallel to thepivotal central axis (axial line X) of the movable plate 21 and linesegments perpendicular to the pivotal central axis (axial line X) of themovable plate 21 (line segments Y). The movable plate 21 having theouter shape described above can be readily formed with precision byanisotropically etching a silicon substrate, as will be described later.Each of the angled portions at each of the stepped outer portion of themovable plate 21 is formed of not only a predetermined crystal surfacebut also a plurality of crystal surfaces. The outer shape of each of theangled portions and portions therearound of the movable plate 21 in theplan view along the thickness direction may therefore not always haveline segments parallel to the axial line X or the line Y in some cases.That is, the outer shape of the movable plate 21 in the plan view alongthe thickness direction is formed of line segments parallel to the axialline X and line segments parallel to the line Y except at least theangled portions of the movable plate 21 described above.

Further, the movable plate 21 has a symmetric shape with respect to thepivotal central axis (axial line X) of the movable plate 21 in a planview. The symmetric shape of the movable plate 21 readily allows thecenter of gravity of the movable plate 21 to be positioned on thepivotal central axis of the movable plate 21, whereby the movable plate21 can smoothly pivot.

The movable plate 21 also has a symmetric shape with respect to the lineY, which passes through the center P of the movable plate 21 and isperpendicular to the pivotal central axis (axial line X) of the movableplate 21 in a plan view. The movable plate is therefore readilydesigned.

Further, each of the plate surfaces (upper and lower surfaces) of themovable plate 21 is formed of the silicon (100) surface. The movableplate 21, the support portion 22, and the pair of connecting portions 23and 24 can therefore be readily formed with precision by anisotropicallyetching a silicon substrate having silicon (100) plate surfaces, as willbe described later.

The side surfaces of the movable plate 21 (surfaces parallel to axialline X, in particular) are formed primarily of the silicon (111)surface. The movable plate 21, the support portion 22, and the pair ofconnecting portions 23 and 24 can therefore be readily formed withprecision by anisotropically etching a silicon substrate having silicon(100) plate surfaces and using the silicon (111) surface as an etchingstop layer, as will be described later. The side surfaces of the angledportions of the stepped outer shape of the movable plate 21 in the planview along the thickness direction of the movable plate 21 are formed ofthe (111) surface and other crystal surfaces. The side surfaces of themovable plate 21 are therefore formed only of the silicon (111) surfaceexcept at least the side surfaces of the angled portions describedabove.

A groove 217 having a V-like shape in a transverse cross sectionperpendicular to the plate surfaces of the movable plate 21 is formed ineach of the side surfaces of the movable plate 21. The groove 217reduces the moment of inertia of the movable plate 21. The groove can bereadily formed with precision by anisotropically etching a siliconsubstrate having silicon (100) plate surfaces and using the silicon(111) surface as an etching stop layer.

Now, let A be the length of the movable plate 21 along the line Y and Bbe the length of the movable plate 21 along the axial line X. Thelengths A and B are equal to each other in the present embodiment butmay differ from each other. When the lengths of A and B differ from eachother, A/B preferably ranges from about 0.8 to 1.2 from the viewpoint ofefficiently ensuring the light reflecting region.

In the present embodiment, the following relationships are satisfied:A>a1>a2 and B>b1>b2.

The lengths A and B are determined in accordance with the diameter andshape of the spot of light to be used and other factors. The lengths Aand B are not limited to specific ones but are, for example, greaterthan or equal to 1.0 mm but smaller than or equal to 2.5 mm.

The thickness of the movable plate 21 is not limited to a specific valuebut is preferably greater than or equal to 60 μm but smaller than orequal to 600 μm, more preferably greater than or equal to 200 μm butsmaller than or equal to 600 μm when A and B fall within the rangedescribed above from the viewpoint of keeping the dynamic distortion atthe time of pivotal motion of the movable plate 21 at a value smallerthan or equal to the wavelength λ of the light L. In the presentembodiment, the thickness of the movable plate 21 is equal to thethickness t of a pair of beam members 231 and 232 and the thickness T ofa silicon substrate 102A, which will be described later.

The light reflector 211 having optical reflectivity is provided on theupper surface of the movable plate 21. On the other hand, a permanentmagnet 41 that forms the driver 4, which will be described later, isprovided on the lower surface of the movable plate 21. The permanentmagnet 41 will be described in detail in association with thedescription of the driver 4, which will be described later.

Each of the connecting portions 23 and 24 has an elongated shape and iselastically deformable. Further, the connecting portion 23 and theconnecting portion 24 are disposed on opposite sides of the movableplate 21. The connecting portions 23 and 24 connect the movable plate 21to the support portion 22 in such a way that the movable plate 21 ispivotal relative to the support portion 22. The pair of connectingportions 23 and 24 are coaxially disposed along the axial line X, andthe movable plate 21 pivots relative to the support portion 22 about theaxial line X, which serves as the pivotal central axis.

In the present embodiment, the connecting portion 23 is formed of a pairof beam members 231 and 232, as shown in FIG. 1. Similarly, theconnecting portion 24 is formed of a pair of beam members 241 and 242.

The thus configured connecting portions 23 and 24 can reduce stressinduced between the connecting portions 23, 24 and the movable plate 21at the time of pivotal motion of the movable plate 21. The connectingportion 23 will be described below as a representative one of theconnecting portions 23 and 24, and the connecting portion 24 will not bedescribed because it is identical with the connecting portion 23.

The beam members 231 and 232 are disposed along the axial line X andface each other with the axial line X therebetween. Further, each of thebeam members 231 and 232 has a parallelogram transverse cross-sectionalshape.

More specifically, each of the beam members 231 and 232 has aparallelogram outer transverse cross-sectional shape formed of a pair ofsides extending in the silicon (100) surface and a pair of sidesextending in the silicon (111) surface. That is, the beam member 231 hasan upper surface 2311 and a lower surface 2312, each of which is formedof the silicon (100) surface, and a pair of side surfaces 2313 and 2314,each of which is formed of the silicon (111) surface. Similarly, thebeam member 232 has an upper surface 2321 and a lower surface 2322, eachof which is formed of the silicon (100) surface, and a pair of sidesurfaces 2323 and 2324, each of which is formed of the silicon (111)surface. Since each of the side surfaces 2313, 2314, 2323, and 2324 isformed of the silicon (111) surface, the inclination angle θ of each ofthe side surfaces with respect to the upper or lower surface of the base2 (that is, silicon (100) surface) is 54.73°. The beam members 231 and232, each of which has the transverse cross-sectional shape describedabove, can be readily and reliably formed by anisotropically etching asilicon substrate having silicon (100) plate surfaces.

The connecting portion 23, the outer surfaces of which are formed of thesilicon (100) surface and the silicon (111) surface, can be readilyformed with precision by using the silicon (111) surface as an etchingstop layer, as will be described later.

Further, the beam members 231 and 232, when viewed in the directionparallel to the axial line X (in other words, in the cross-sectionalview of FIG. 5), are symmetric with respect to a line that extends inthe up-down direction and intersects the axial line X.

Further, the width of the entire connecting portion 23 (inter-surfacedistance between side surface 2313 of beam member 231 and side surface2323 of beam member 232) (gradually) increases in the direction from thelower side toward the upper side, as shown in the cross-sectional viewof FIG. 5. The width of the entire connecting portion 23 is the widthmeasured when the connecting portion 23 formed of the beam members 231and 232 is taken as a single member, and the width is the distancebetween the two surfaces that form the connecting portion 23 and aremost remote from the pivotal central axis in the direction perpendicularthereto.

The distance between the beam member 231 and the beam member 232 (widthof the gap therebetween) also (gradually) increases in the directionfrom the lower side toward the upper side, as shown in thecross-sectional view of FIG. 5. The distance between the beam member 231and the beam member 232 is the distance between the surface of the beammember 231 (side surface 2314) and the surface of the beam member 232(side surface 2324) that face each other with the pivotal central axistherebetween, in the direction parallel to the plate surface of themovable plate 21.

That is, the distance between the pair of beam members 231 and 232, whenviewed in the direction parallel to the pivotal central axis of themovable plate 21, gradually increases in the direction from one of theplate surfaces toward the other plate surface of the movable plate 21(from the lower side toward the upper side in the present embodiment).

The thus configured connecting portion 23 can be readily formed withprecision at the same time as the formation of the movable plate 21having the shape in a plan view described above by anisotropicallyetching a silicon substrate, as will be described later.

Now, let W₁ be the distance between the lower ends of the pair of beammembers 231 and 232 and t be the thickness of the pair of beam members231 and 232 in the thickness direction of the movable plate 21. The twovalues satisfy the following Expression (1).

$\begin{matrix}{W_{1} < \frac{t}{\tan \; 54.73{^\circ}}} & (1)\end{matrix}$

To anisotropically etch opposite surfaces of a silicon substrate havingsilicon (100) plate surfaces, a mask is formed on each of the oppositesurfaces of the silicon substrate before the movable plate 21, thesupport portion 22, and the pair of connecting portions 23 and 24 areformed, as will be described later in detail. In this process, thepositions where the masks are formed are shifted from each other in somecases. When the positions where the masks are formed on the oppositesurfaces of the silicon substrate are shifted from each other, steps aredisadvantageously formed on the pair of side surfaces 2313 and 2314 andthe pair of side surfaces 2323 and 2324, which are preferably formed bythe silicon (111) surfaces, of the beam members 231 and 232. When thepositions where the masks are formed on the opposite surfaces of thesilicon substrate are shifted from each other but Expression (1)described above is satisfied, the step formed on one of each of thepairs of side surfaces and the step formed on the other side surface ofthe pair of side surfaces can be shifted in the thickness direction ofthe silicon substrate (see FIG. 12D). As a result, stress concentrationin each of the beam members 231 and 232 that occurs at the time ofpivotal motion of the movable plate 21 can be reduced.

Possible damage to the optical scanner 1 due to stress concentrationthat occurs when the optical scanner 1 is driven can thus be relativelyreadily prevented.

Further, let W₂ be the distance between the upper ends of the pair ofbeam members 231 and 232. The value plus the two values described abovesatisfy the following Expression (2).

$\begin{matrix}{t < {\frac{\tan \; 54.73{^\circ}}{2}( {W_{1} + W_{2}} )}} & (2)\end{matrix}$

When Expression (2) is satisfied, the connecting portion 23 formed ofthe pair of beam members 231 and 232 can be readily and reliably formedby anisotropically etching opposite surfaces of a silicon substratehaving silicon (100) plate surfaces.

Support

The support 3 supports the base 2 described above. The support 3 alsosupports a coil 42 that form the driver 4, which will be describedlater.

The support 3 has a box-like shape having a recess 31 open upward. Inother words, the supports 3 is formed of a plate-shaped portion 32having a plate-like shape and a frame-shaped portion 33 having aframe-like shape and provided along the periphery of the upper surfaceof the plate-shaped portion 32.

The lower surface of the support portion 22 of the base 2 describedabove is bonded to the upper surface of the support 3, which is theportion outside the recess 31, that is, the upper surface of theframe-shaped portion 33. A space that allows the movable plate 21 topivot is thus formed between the movable plate 21/the pair of connectingportions 23, 24 of the base 2 and the support 3.

The material of which the support 3 is made is not limited to a specificone and may, for example, be quartz glass, PYREX glass (“PYREX” is aregistered trade mark), TEMPAX glass, or any other glass material;single crystal silicon, polysilicon, or any other silicon material; andLTCC (low-temperature co-fire ceramic).

A method for bonding the base 2 to the support 3, which is determined asappropriate in accordance with the material, the shape, and otherfactors of the support 3, is not limited to a specific one and may be anadhesive-based method, anodic bonding, direct bonding, or any othersuitable method.

Driver

The driver 4, which includes the permanent magnet 41 and the coil 42,causes pivotal motion of the movable plate 21 of the base 2 describedabove by electromagnetically driving the movable plate 2 (morespecifically, based on a moving magnet method). The electromagneticdriving can produce a large drive force. The driver 4 based on theelectromagnetic driving can therefore produce a large pivotal angle ofthe movable plate 21 while using a reduced drive voltage.

The permanent magnet 41 is fixed to the lower surface of the movableplate 21, for example, with an adhesive. Further, the permanent magnet41 has an elongated shape and extends in the direction perpendicular tothe axial line X in a plan view. The permanent magnet 41 is magnetizedin the longitudinal direction and has one side in the longitudinaldirection being the south pole and the other side being the north pole.When the permanent magnet 41 is so disposed that it extends in thedirection perpendicular to the axial line X, both ends of the permanentmagnet 41 can be set apart from the axial line X. The arrangement allowsthe movable plate 21 to receive a large magnitude of torque from themagnetic field induced by the coil 42.

The permanent magnet 41 is not limited to a specific one and can, forexample, preferably be a neodymium magnet, a ferrite magnet, asamarium-cobalt magnet, an alnico magnet, a bonded magnet, and any othermagnet formed of a magnetized hard magnetic material.

The coil 42 is so disposed on a bottom surface 311 of the recess 31 ofthe support 3 that the coil 42 faces the movable plate 21. Thearrangement allows the magnetic field induced by the coil 42 toeffectively act on the permanent magnet 41. The coil 42 is electricallyconnected to a power supply (not shown), which applies periodicallychanging voltage (such as AC voltage, intermittent current) to the coil42.

The thus configured driver 4 causes the movable plate 21 to pivot asfollows.

First, the power supply (not shown) applies, for example, an AC voltageto the coil 42. The AC voltage application alternately and periodicallyinduces a first magnetic field in which the upper side of the coil 42(the side where the movable plate 21 is present) forms the north poleand the lower side of the coil 42 forms the south pole and a secondmagnetic field in which the upper side of the coil 42 forms the southpole and the lower side of the coil 42 forms the north pole.

In the first magnetic field, the coil 42 attracts the south pole of thepermanent magnet 41 whereas repulsing the north pole of the permanentmagnet 41, whereby the movable plate 21 pivots about the axial line Xcounterclockwise in FIG. 2 (first state). In contrast, in the secondmagnetic field, the coil 42 attracts the north pole of the permanentmagnet 41 whereas repulsing the south pole of the permanent magnet 41,whereby the movable plate 21 pivots about the axial line X clockwise inFIG. 2 (second state). The first and second states are alternatelyrepeated, and the movable plate 21 pivots about the axial line X.

Method for Manufacturing Actuator

The optical scanner 1 described above can be manufactured, for example,as follows: As an example of a method for manufacturing an actuatoraccording to an embodiment of the invention, a method for manufacturingthe optical scanner 1 will be described with reference to FIGS. 6A to 6Gto FIGS. 12A to 12D.

FIGS. 6A to 6G to FIGS. 8A to 8G are cross-sectional views fordescribing the method for manufacturing the optical scanner shown inFIG. 1. FIG. 9 is a partial enlarged plan view showing the movable plateafter an etching step shown in FIG. 8E. FIG. 10 is a partial enlargedplan view showing a mask used in the etching step shown in FIG. 8E.FIGS. 11A to 11D describe formation of the connecting portions in theetching step (when no mask shift occurs) shown in FIG. 8E. FIGS. 12A to12D describe the formation of the connecting portions in the etchingstep (when mask shift occurs) shown in FIG. 8E. FIGS. 6A to 6G to 8A to8G are cross-sectional views corresponding to FIG. 2, and FIGS. 11A to11D and 12A to 12D are cross-sectional views corresponding to FIG. 5.

The method for manufacturing the optical scanner 1 includes the step offorming the base 2.

The step of forming the base 2 includes A: the step of forming a recess218 and B: the step of forming the movable plate 21, the support portion22, and the pair of connecting portions 23 and 24.

Each of the steps will be sequentially described below in detail.

A. Step of Forming Recess 218 A1

A silicon substrate 102 is first provided, as shown in FIG. 6A.

The silicon substrate 102 will form the base 2 after undergoing etching,which will be described later.

Specifically, the silicon substrate 102 is so configured that eachprincipal surface thereof is the silicon (100) surface.

A2

A nitride film 51 is then formed on the upper surface of the siliconsubstrate 102, and a nitride film 52 is formed on the lower surface ofthe silicon substrate 102, as shown in FIG. 6B.

Each of the nitride films 51 and 52 is made, for example, of SiN.

A method for forming the nitride films 51 and 52 is not limited to aspecific one. For example, vapor deposition, such as plasma CVD, can beused.

The thickness of each of the nitride films 51 and 52 is not limited to aspecific value and is greater than or equal to about 0.01 μm but smallerthan or equal to about 0.2 μm.

The nitride films 51 and 52 may be replaced with oxide films made of SiOformed, for example, in a thermal oxidation process.

A3

A resist film 61 is then formed on the nitride film 51 as shown in FIG.6C, and a resist film 62 is formed on the nitride film 52 as shown inFIG. 6D.

The resist films 61 and 62 are made of a positive or negative resistmaterial.

A4

The resist film 62 is then exposed to light and developed to remove aportion of the resist film 62 that corresponds to a region where therecess 218 is formed. A resist film 62A having an opening 621 is thusformed, as shown in FIG. 6E.

A5

The resist film 62A is then used as a mask to etch away part of thenitride film 52. A nitride film 52A having an opening 521 is thusformed, as shown in FIG. 6F.

The etching described above (method for forming opening 521) is notlimited to a specific one and may, for example, be reactive ion etching(RIE) or dry etching using CF₄.

A6

The resist films 61 and 62A are then removed. The removal of the resistfilms leaves the upper surface of the silicon substrate 102 covered withthe nitride film 51 and the lower surface of the silicon substrate 102covered with the nitride film 52A, as shown in FIG. 6G.

A method for removing the resist films 61 and 62A is not limited to aspecific one and may, for example, be sulfuric-acid washing or O₂ashing.

The nitride film 52A is then used as a mask to etch the siliconsubstrate 102. A silicon substrate 102A having the recess 218 is thusformed, as shown in FIG. 7A.

The etching described above (method for forming recess 218) is notlimited to a specific one and anisotropic etching is preferably used, asin an etching process of forming the movable plate 21, the supportportion 22, and other components, which will be described later.

The anisotropic etching is not limited to a specific one and wetetching, for example, using a KOH aqueous solution can, for example, beused.

A8

The nitride films 51 and 52A are then removed. The removal of thenitride films allows the upper and lower surfaces of the siliconsubstrate 102A to be exposed, as shown in FIG. 7B.

A method for removing the nitride films 51 and 52A is not limited to aspecific one and may, for example, be reactive ion etching (RIE) or dryetching using CF₄, as in step A5 described above.

B. Step of Forming Movable Plate 21, Support Portion 22, and OtherComponents B1

A nitride film 71 is then formed on the upper surface of the siliconsubstrate 102A, and a nitride film 72 is formed on the lower surface ofthe silicon substrate 102A, as shown in FIG. 7C.

The nitride films 71 and 72 are made, for example, of SiN.

A method for forming the nitride films 71 and 72 is not limited to aspecific one. For example, vapor deposition, such as plasma CVD, can beused, as in step A2 described above.

The thickness of each of the nitride films 71 and 72 is not limited to aspecific value and is greater than or equal to about 0.01 μm but smallerthan or equal to about 0.3 μm.

The nitride films 71 and 72 may be replaced with oxide films made of SiOformed, for example, in a thermal oxidation process.

B2

A resist film 81 is then formed on the nitride film 71 as shown in FIG.7D.

The resist film 81 is made of a positive or negative resist material.

B3

The resist film 81 is then so exposed to light and developed that partof the resist film 81 is removed to leave portions of the resist film 81that correspond to regions where the movable plate 21, the supportportion 22, and the pair of connecting portions 23 and 24 are formed. Aresist film 81A having openings 811 is thus formed, as shown in FIG. 7E.Although not shown in FIG. 7E, an opening corresponding to the gapbetween the upper ends of the pair of beam members 231 and 232 is alsoformed in the resist film 81A.

B4

The resist film 81A is then used as a mask to etch away part of thenitride film 71. A nitride film 71A having openings 711 is thus formed,as shown in FIG. 7F. Although not shown in FIG. 7F, an openingcorresponding to the gap between the upper ends of the pair of beammembers 231 and 232 is also formed in the nitride film 71A.

The etching described above (method for forming openings 711) is notlimited to a specific one and may, for example, be reactive ion etching(RIE) or dry etching using CF₄, as in step A5 described above.

B5

The resist film 81A is then removed. The removal of the resist filmleaves the upper surface of the silicon substrate 102A covered with thenitride film 71A and the lower surface of the silicon substrate 102Acovered with the nitride film 72, as shown in FIG. 7G.

A method for removing the resist film 81A is not limited to a specificone and may, for example, be sulfuric-acid washing or O₂ ashing.

B6

A resist film 82 is then formed on the nitride film 72, as shown in FIG.8A.

The resist film 82 is made of a positive or negative resist material.

B7

The resist film 82 is then so exposed to light and developed that partof the resist film 82 is removed to leave portions of the resist film 82that correspond to regions where the movable plate 21, the supportportion 22, and the pair of connecting portions 23 and 24 are formed. Aresist film 82A having openings 821 is thus formed, as shown in FIG. 8B.Although not shown in FIG. 8B, an opening corresponding to the gapbetween the lower ends of the pair of beam members 231 and 232 is alsoformed in the resist film 82A.

B8

The resist film 82A is then used as a mask to etch away part of thenitride film 72. A nitride film 72A having openings 721 is thus formed,as shown in FIG. 8C. Although not shown in FIG. 8C, an openingcorresponding to the gap between the lower ends of the pair of beammembers 231 and 232 is also formed in the nitride film 72A.

The etching described above (method for forming openings 721) is notlimited to a specific one and may, for example, be reactive ion etching(RIE) or dry etching using CF₄, as in step A5 described above.

B9

The resist film 82A is then removed. The removal of the resist filmleaves the upper surface of the silicon substrate 102A covered with thenitride film 71A and the lower surface of the silicon substrate 102Acovered with the nitride film 72A, as shown in FIG. 8D.

A method for removing the resist film 82A is not limited to a specificone and may, for example, be sulfuric-acid washing or O₂ ashing.

B10

The nitride films 71A and 72A are then used as masks to anisotropicallyetch the silicon substrate 102A. The base 2 is thus provided, as shownin FIG. 8E. That is, in the anisotropic etching in the present step, themovable plate 21, the support portion 22, and the pair of connectingportions 23 and 24 are formed by anisotropically etching opposite sidesof the silicon substrate 102A through the nitride film 72A, which is afirst mask, and the nitride film 71A, which is a second mask.

The anisotropic etching described above (method for forming base 2) isnot limited to a specific one and wet etching, for example, using a KOHaqueous solution can, for example, be used.

Formation of Movable Plate

Formation of the movable plate 21 in the anisotropic etching will bedescribed in detail.

To provide the movable plate 21 having the shape in a plan view shown inFIG. 9 in the anisotropic etching, the nitride film 71A used as a maskhas a portion 715 corresponding to the movable plate 21 and portions(correction masks) 716 to 718 for forming the angled portions of thestepped, truncated portion 251, as shown in FIG. 10. Although not shown,the nitride film 71A also has portions for forming the angled portionsof the other truncated portions 252 to 254.

The movable plate 21 having the shape in the plan view described abovecan be formed by performing the anisotropic etching along with thenitride film 71A, which has the shape in the plan view of FIG. 10.

In this process, the area of each of the portions 716 to 718, which formcorrection masks, is determined in accordance with the thickness of themovable plate 21, that is, the thickness of the silicon substrate 102Athat undergoes the anisotropic etching. In other words, it is necessaryto increase the area with the thickness of the silicon substrate 102A.Further, the number of portions that form the correction masks isdesirably equal to the number of angled portions of each of thetruncated portions.

In view of the fact described above, the number of angled portions thatcan be formed for each of the truncated portions in the movable plate islimited by the area of the movable plate in a plan view and thethickness thereof.

In the present embodiment, the lengths A and B of the movable plate 21are set to be greater than or equal to 1.0 mm but smaller than or equalto 2.5 mm, and the thickness of the silicon substrate 102A is set to begreater than or equal to 60 μm but smaller than or equal to 600 μm. Thethus set dimensions allow the formed movable plate 21 to have thetruncated portions 251 to 254, each of which has a two-step steppedportion described above.

Formation of Connecting Portions

Formation of the connecting portion 23 in the anisotropic etching willbe described in detail. Formation of the connecting portion 24 will notbe described because it is the same as the formation of the connectingportion 23.

The nitride film 71A used as a mask (second mask) has a portion 712formed in correspondence with a region where the upper surface of thebeam member 231 of the connecting portion 23 is formed, a portion 713formed in correspondence with a region where the upper surface of thebeam member 232 of the connecting portion 23 is formed, and an opening(second opening) 714 formed between the portion 712 and the portion 713,as shown in FIG. 11A. The opening 714 is formed in correspondence withthe gap between the upper ends of the pair of beam members 231 and 232.

Similarly, the nitride film 72A used as a mask (first mask) has aportion 722 formed in correspondence with a region where the lowersurface of the beam member 231 of the connecting portion 23 is formed, aportion 723 formed in correspondence with a region where the lowersurface of the beam member 232 of the connecting portion 23 is formed,and an opening (first opening) 724 formed between the portion 722 andthe portion 723. The opening 724 is formed in correspondence with thegap between the lower ends of the pair of beam members 231 and 232.

Now, let W_(m1) be the width of the opening 724, and T be the thicknessof the silicon substrate 102A. The two values satisfy the followingExpression (3).

$\begin{matrix}{W_{m\; 1} < \frac{T}{\tan \; 54.73{^\circ}}} & (3)\end{matrix}$

When the nitride film 72A, which is the first mask, and the nitride film71A, which is the second mask, are shifted from each other so that stepsare produced on a pair of side surfaces preferably formed of the silicon(111) surface of each of the beam members 231 and 232, but Expression(3) is satisfied, the step formed on one of the side surfaces and thestep formed on the other side surface can be shifted in the thicknessdirection of the silicon substrate. As a result, in the resultantactuator, stress concentration in each of the beam members 231 and 232that occurs at the time of pivotal motion of the movable plate 21 can bereduced.

Further, let W_(m2) be the width of the opening 714. The value plus thetwo values described above satisfy the following Expression (4).

$\begin{matrix}{T < {\frac{\tan \; 54.73{^\circ}}{2}( {W_{m\; 1} + W_{m\; 2}} )}} & (4)\end{matrix}$

When Expression (4) is satisfied, the connecting portion 23 formed ofthe pair of beam members 231 and 232 can be readily and reliably formedby anisotropically etching the opposite surfaces of the siliconsubstrate 102A having silicon (100) plate surfaces.

How steps are formed in the anisotropic etching in the present step willbe described below in detail.

In the anisotropic etching in the present step, when the positions wherethe nitride films 71A and 72A, which are used as masks, are formed arenot shifted from each other, the upper surface of the silicon substrate102A is etched through the openings 711 and 714 and the lower surface ofthe silicon substrate 102A is etched through the openings 721 and 724,whereby the pair of beam members 231 and 232 are formed, as shown inFIGS. 11A to 11D.

In this case, since the positions of the centers of the openings 714 and724 in the width direction coincide with each other, each of theresultant side surfaces of the beam members 231 and 232 is a smoothinclined surface having no step and formed of the silicon (111) surface,as shown in FIG. 11D.

On the other hand, in the anisotropic etching in the present step, whenthe positions where the nitride films 71A and 72A, which are used asmasks, are formed are shifted from each other, the upper surface of thesilicon substrate 102A is etched through the openings 711 and 714 andthe lower surface of the silicon substrate 102A is etched through theopenings 721 and 724, whereby the pair of beam members 231 and 232 areformed, as shown in FIGS. 12A to 12D.

In this case, since the positions of the centers of the openings 714 and724 in the width direction differ from each other, a step 2315 is formedon one of the side surfaces of the beam member 231, and a step 2316 isformed on the other side surface of the beam member 231, as shown inFIG. 12D. Similarly, a step 2325 is formed on one of the side surfacesof the beam member 232, and a step 2326 is formed on the other sidesurface of the beam member 232.

Since the width of the opening 724 in the nitride film 72A, which isused as a mask as described above, satisfies Expression (3) describedabove, the step 2316 is formed in a position away from the center in thethickness direction of the silicon substrate 102A and closer to thenitride film 72A (lower side).

In contrast, since the width of the opening 711 in the nitride film 71Aand the width of the opening 721 in the nitride film 72A are much largerthan the thickness of the silicon substrate 102A, the step 2315 isformed at the center in the thickness direction of the silicon substrate102A.

As a result, the positions of the steps 2315 and 2316 differ from eachother in the thickness direction of the silicon substrate 102A.Similarly, the positions of the steps 2325 and 2326 differ from eachother in the thickness direction of the silicon substrate 102A.

As described above, since the positions of the steps 2315 and 2316differ from each other in the thickness direction of the siliconsubstrate 102A, stress concentration in a central portion of the beammember 231 in the thickness direction can be prevented or reduced at thetime of pivotal motion of the movable plate 21. Similarly, stressconcentration in a central portion of the beam member 232 in thethickness direction can be prevented or reduced at the time of pivotalmotion of the movable plate 21. As a result, the connecting portion 23will not be damaged due to the stress concentration when the actuator isdriven. Similarly, the connecting portion 24 will not be damaged due tothe stress concentration when the actuator is driven.

If the width of the opening 724 does not satisfy Expression (3), thesteps 2315, 2316, 2325, and 2326 are formed at the center in thethickness direction of the silicon substrate 102A. That is, the steps2315, 2316, 2325, and 2326 are formed in the same position in thethickness direction of the silicon substrate 102A. As a result, the beammembers could be damaged due to the stress concentration when theactuator is driven.

B11

The nitride films 71A and 72A are then removed. The removal of thenitride films allows the upper and lower surfaces of the base 2 to beexposed, as shown in FIG. 8F.

A method for removing the nitride films 71A and 72A is not limited to aspecific one and may, for example, be reactive ion etching (RIE), dryetching using CF₄, or a wet process using hot phosphoric acid, as instep A5 described above.

Further, the angled portions of the base 2 are rounded as required.

The process (rounding) is not limited to a specific one and may, forexample, be isotropic etching using hydrofluoric acid, nitric acid, andacetic acid (or water) or a thermal treatment (under reduced pressure,at temperature ranging from about 1000 to 1200° C., in Ar atmosphereinto which H₂ is introduced).

The permanent magnet 41 is then fixed to the lower surface of themovable plate 21 with an adhesive, as shown in FIG. 8G. Alternatively, ahard magnetic material may be fixed to the lower surface of the movableplate 21 with an adhesive and then magnetized to form the permanentmagnet 41.

Further, a metal film is formed on the upper surface of the movableplate 21 to form the light reflector 211. A method for forming the metalfilm is not limited to a specific one and may, for example, be vacuumevaporation, sputtering (low-temperature sputtering), ion plating or anyother dry plating, electrolysis plating, electroless plating or anyother wet plating, flame spraying, or metal foil bonding.

Although not shown, the coil 42 is provided in the support 3, and thebase 2 is bonded to the support 3.

The optical scanner 1 is thus produced by carrying out the stepsdescribed above.

In the resultant optical scanner 1 (actuator) manufactured in accordancewith the method for manufacturing the optical scanner 1 described above,stress concentration in each of the beam members 231, 232, 241, and 242at the time of pivotal motion of the movable plate 21 can be reducedbecause Expression (3) is satisfied.

In the optical scanner 1 (actuator) according to the first embodimentdescribed above, since the movable plate 21 has the stepped, truncatedportions 251 to 254, the moment of inertia at the time of pivotal motionof the movable plate 21 can be reduced while the light reflecting regionof the movable plate 21 is ensured.

Further, anisotropic etching of a silicon substrate allows the movableplate 21 to be readily formed with precision.

Second Embodiment

A second embodiment of the invention will next be described.

FIG. 13 is a plan view showing an optical scanner according to thesecond embodiment of the invention, and FIG. 14 is a partial enlargedcross-sectional view taken along the line B-B shown in FIG. 13.

The optical scanner according to the second embodiment will be describedbelow, primarily about what differs from the optical scanner accordingto the embodiment described above, and no description of the same itemswill be made.

The optical scanner according to the second embodiment is substantiallythe same as the optical scanner 1 according to the first embodiment butdiffers therefrom in terms of the transverse cross-sectional shape ofthe connecting portions. The same components as those in the embodimentdescribed above have the same reference characters.

An optical scanner 1A according to the present embodiment includes abase 2A having an oscillatory system, as shown in FIG. 13. The base 2Aincludes a movable plate 21, a support portion 22, a pair of connectingportions 23A and 24A that pivotally connect the movable plate 21 to thesupport portion 22.

The connecting portion 23A will be described below as a representativeone of the connecting portions 23A and 24A, and the connecting portion24A will not be described because it is identical with the connectingportion 23A.

The connecting portion 23A is disposed along the axial line X and has atrapezoidal transverse cross-sectional shape.

More specifically, the connecting portion 23A has a symmetric shape withrespect to a line that extends in the up-down direction and intersectsthe axial line X (bilaterally symmetric in FIG. 14) when viewed in thedirection parallel to the axial line X (in other words, in thecross-sectional view of FIG. 14).

Further, in the cross-sectional view of FIG. 14, the width of the entireconnecting portion 23A (gradually) increases in the direction from thelower side toward the upper side.

Further, the connecting portion 23A has an outer transversecross-sectional shape formed of a pair of sides extending in the silicon(100) surface and a pair of sides extending in the silicon (111)surface. That is, the connecting portion 23A has an upper surface 233and a lower surface 234, each of which is formed of the silicon (100)surface, and a pair of side surfaces 235 and 236, each of which isformed of the silicon (111) surface. The side surfaces 235 and 236 areinclined to the upper surface 233 or the lower surface 234 by aninclination angle θ of 54.73°. The connecting portion 23A, which has thetransverse cross-sectional shape described above, can be readily formedwith precision by anisotropically etching a silicon substrate havingsilicon (100) plate surfaces, as in the case of the connecting portion23 in the first embodiment described above.

In the optical scanner 1A according to the second embodiment describedabove, the moment of inertia at the time of pivotal motion of themovable plate can also be reduced while the light reflecting region isensured, and excellent dimensional precision of the movable plate can bereadily ensured.

Third Embodiment

A third embodiment of the invention will next be described.

FIG. 15 is a plan view for describing a movable plate provided in anoptical scanner according to the third embodiment of the invention.

The optical scanner according to the third embodiment will be describedbelow, primarily about what differs from the optical scanners accordingto the embodiments described above, and no description of the same itemswill be made.

The optical scanner according to the third embodiment is substantiallythe same as the optical scanner 1 according to the first embodiment butdiffers therefrom in terms of the shape of the movable plate in a planview. The same components as those in the embodiments described abovehave the same reference characters.

In the optical scanner according to the present embodiment, each of thefour corners of a movable plate 21B has a three-step stepped shape in aplan view along the thickness direction, as shown in FIG. 15. That is,each of the four corners has seven angled portions. In still otherwords, the length (width) of the movable plate 21B along the axial lineX decreases stepwise in three steps with distance from the center towardboth ends along the line Y in the plan view viewed along the thicknessdirection. As a result, the length (width) of the movable plate 21Balong the axial line X has four values. The length (width) of themovable plate 21B along the line Y also decreases stepwise in threesteps with distance from the center toward both ends along the axialline X in the plan view viewed along the thickness direction. As aresult, the length (width) of the movable plate 21B along the line Y hasfour values. The light reflecting region of the movable plate 21B cantherefore be efficiently ensured.

More specifically, the movable plate 21B includes a main body 212B, apair of protrusions 213B and 214B that protrude from the main body 212Bin opposite directions along the axial line X, and a pair of protrusions215B and 216B that protrude from the main body 212B in oppositedirections along the line Y.

A truncated portion 251B is formed between the protrusion 213B and theprotrusion 215B. A truncated portion 252B is formed between theprotrusion 213B and the protrusion 216B. A truncated portion 254B isformed between the protrusion 214B and the protrusion 216B. A truncatedportion 253B is formed between the protrusion 214B and the protrusion215B.

In the optical scanner according to the third embodiment describedabove, the moment of inertia at the time of pivotal motion of themovable plate can also be reduced while the light reflecting region isensured, and excellent dimensional precision of the movable plate can bereadily ensured.

Fourth Embodiment

A fourth embodiment of the invention will next be described.

FIG. 16 is a plan view for describing a movable plate provided in anoptical scanner according to the fourth embodiment of the invention.

The optical scanner according to the fourth embodiment will be describedbelow, primarily about what differs from the optical scanners accordingto the embodiments described above, and no description of the same itemswill be made.

The optical scanner according to the fourth embodiment is substantiallythe same as the optical scanner 1 according to the first embodiment butdiffers therefrom in terms of the shape of the movable plate in a planview. The same components as those in the embodiments described abovehave the same reference characters.

A movable plate 21C provided in the optical scanner according to thepresent embodiment includes a main body 212C, a pair of protrusions 213Cand 214C that protrude from the main body 212C in opposite directionsalong the axial line X, and a pair of protrusions 215C and 216C thatprotrude from the main body 212C in opposite directions along the lineY, as shown in FIG. 16.

A truncated portion 251C is formed between the protrusion 213C and theprotrusion 215C. A truncated portion 252C is formed between theprotrusion 213C and the protrusion 216C. A truncated portion 254C isformed between the protrusion 214C and the protrusion 216C. A truncatedportion 253C is formed between the protrusion 214C and the protrusion215C.

In the present embodiment, a3<b3 is satisfied, where a3 is the length ofeach of the truncated portions 251C to 254C along the line Y and b3 isthe length of each of the truncated portions 251C to 254C along theaxial line X. That is, each of the truncated portions 251C to 254C is soshaped that the length along the axial line X is greater than the lengthalong the line Y. The mass of end portions of the movable plate 21C thatare remote from the axial line X can thus be efficiently reduced. Themoment of inertia at the time of pivotal motion of the movable plate 21Ccan therefore be efficiently reduced.

In the optical scanner according to the fourth embodiment describedabove, the moment of inertia at the time of pivotal motion of themovable plate can also be reduced while the light reflecting region isensured, and excellent dimensional precision of the movable plate can bereadily ensured.

Fifth Embodiment

A fifth embodiment of the invention will next be described.

FIG. 17 is a plan view for describing a movable plate provided in anoptical scanner according to the fifth embodiment of the invention.

The optical scanner according to the fifth embodiment will be describedbelow, primarily about what differs from the optical scanners accordingto the embodiments described above, and no description of the same itemswill be made.

The optical scanner according to the fifth embodiment is substantiallythe same as the optical scanner 1 according to the first embodiment butdiffers therefrom in terms of the shape of the movable plate in a planview. The same components as those in the embodiments described abovehave the same reference characters.

A movable plate 21D provided in the optical scanner according to thepresent embodiment includes a main body 212D, a pair of protrusions 213Dand 214D that protrude from the main body 212D in opposite directionsalong the axial line X, and a pair of protrusions 215D and 216D thatprotrude from the main body 212D in opposite directions along the lineY, as shown in FIG. 17.

A truncated portion 251D is formed between the protrusion 213D and theprotrusion 215D. A truncated portion 252D is formed between theprotrusion 213D and the protrusion 216D. A truncated portion 254D isformed between the protrusion 214D and the protrusion 216D. A truncatedportion 253D is formed between the protrusion 214D and the protrusion215D.

In the present embodiment, a3>b3 is satisfied, where a3 is the length ofeach of the truncated portions 251D to 254D along the line Y and b3 isthe length of each of the truncated portions 251D to 254D along theaxial line X. That is, each of the truncated portions 251D to 254D is soshaped that the length along the axial line X is smaller than the lengthalong the line Y. In the configuration described above, for example,when light is designed to be incident on the movable plate 21D at anangle of incidence inclined about the line Y, the light can bepreferably reflected off the movable plate 21D.

In the optical scanner according to the fifth embodiment describedabove, the moment of inertia at the time of pivotal motion of themovable plate can also be reduced while the light reflecting region isensured, and excellent dimensional precision of the movable plate can bereadily ensured.

The optical scanners described above can suitably be used in aprojector, a laser printer, an imaging display, a barcode reader, ascanning confocal microscope, and other image forming apparatus. Such animage forming apparatus therefore has excellent image drawingcharacteristics.

Image Forming Apparatus

An example of an image forming apparatus according to an embodiment ofthe invention will be described with reference to FIG. 18.

FIG. 18 is a schematic view showing an example of the configuration ofthe image forming apparatus according to the embodiment of theinvention. In the following description, the longitudinal direction of ascreen SC is called a “horizontal direction,” and the directionperpendicular to the longitudinal direction is called a “verticaldirection,” for ease of description.

A projector 9 includes a light source apparatus 91 that outputs light,such as laser light, a cross-dichroic prism 92, a pair of opticalscanners 93 and 94 according to any of the embodiments of the invention(optical scanner configured in the same manner as the optical scanner 1,for example), and a fixed mirror 95.

The light source apparatus 91 includes a red light source 911 that emitsred light, a blue light source 912 that emits blue light, and a greenlight source 913 that emits green light.

The cross-dichroic prism 92 is an optical element that is formed bybonding four right-angle prisms and combines light fluxes emitted fromthe red light source 911, the blue light source 912, and the green lightsource 913.

In the thus configured projector 9, the cross-dichroic prism 92 combinesthe light fluxes emitted from the red light source 911, the blue lightsource 912, and the green light source 913 based on image informationfrom a host computer (not shown), and the combined light is deflected bythe optical scanners 93 and 94, reflected off the fixed mirror 95, andforms a color image on the screen SC.

How the optical scanners 93 and 94 deflect light will be specificallydescribed.

The light combined in the cross-dichroic prism 92 is first deflected bythe optical scanner 93 in the horizontal direction (primary scan). Thelight deflected in the horizontal direction is then further deflected bythe optical scanner 94 in the vertical direction (secondary scan). Atwo-dimensional color image can thus be formed on the screen SC. Usingthe optical scanner according to any of the embodiments of the inventionas each of the optical scanners 93 and 94 provides extremely excellentimage drawing characteristics.

It is noted that the projector 9 is not necessarily configured asdescribed above but can be configured differently as long as the opticalscanners deflect light to form an image on an intended surface. Forexample, the fixed mirror 95 can be omitted.

According to the thus configured projector 9, which includes the opticalscanners 93 and 94, each of which has the same configuration as that ofthe optical scanner 1 described above, a high-quality image can beproduced at a low cost.

The actuators, the optical scanners, and the image forming apparatusaccording to the embodiments of the invention have been described withreference to the drawings, but the invention is not limited to theembodiments. For example, the configuration of each of the actuators,the optical scanners, and the image forming apparatus according to theembodiments of the invention can be replaced with an arbitraryconfiguration that provides the same function as that provided in theembodiments described above and an arbitrary component can be added.

The above embodiments have been described with reference to the casewhere the movable plate has a symmetrical shape with respect to at leastone of the pivotal central axis and a line perpendicular thereto in aplan view, but the movable plate is not necessarily shaped this way. Themovable plate may have an asymmetrical shape with respect to the pivotalcentral axis and a line perpendicular thereto in a plan view.

The above embodiments have been described with reference to the casewhere the actuator according to any of the embodiments of the inventionis used as an optical scanner, but the actuator according to any of theembodiments of the invention is not necessarily used as an opticalscanner. For example, the actuator according to any of the embodimentsof the invention can be used as an optical switch, an opticalattenuator, or any other optical device.

The above embodiments have been described with reference to the casewhere the driver that allows the movable plate to pivot is a movingmagnet driver that electromagnetically drives the movable plate. Thedriver may alternatively be a moving coil driver thatelectromagnetically drives the movable plate, an electrostatic driver, apiezoelectric driver, or any other driver based on a non-electromagneticdriving method.

What is claimed is:
 1. An actuator comprising: a movable portion thatswings about a swing axis; a connecting portion that extends from themovable portion and torsionally deforms in response to the swinging ofthe movable portion; and a support portion that supports the connectingportion, wherein the movable portion is so shaped that the lengththereof parallel to the swing axis decreases stepwise with distance fromthe swing axis in a plan view.
 2. The actuator according to claim 1,wherein the length of the movable portion parallel to the swing axisdecreases in two steps with distance from the swing axis in the planview.
 3. The actuator according to claim 1, wherein the movable portionhas an outer shape in the plan view that is formed primarily of a linesegment parallel to the swing axis and a line segment perpendicular tothe swing axis.
 4. The actuator according to claim 1, wherein each platesurface of the movable portion is formed of a silicon (100) surface. 5.The actuator according to claim 1, wherein a side surface of the movableportion is primarily formed of a silicon (111) surface.
 6. The actuatoraccording to claim 5, wherein a groove having a V-like shape in across-sectional view taken along a plane perpendicular to plate surfacesof the movable portion is formed in the side surface of the movableportion.
 7. The actuator according to claim 1, wherein surfaces of theconnecting portion are formed of a silicon (100) surface and a silicon(111) surface.
 8. The actuator according to claim 1, wherein the movableportion has a shape symmetric with respect to the swing axis in the planview.
 9. The actuator according to claim 8, wherein the movable portionhas a shape symmetric with respect to a line passing through a center ofthe movable portion and perpendicular to the swing axis in the planview.
 10. An optical scanner comprising: a movable portion that includesa light reflector having light reflectivity and swings about a swingaxis; a connecting portion that extends from the movable portion andtorsionally deforms in response to the swinging of the movable portion;and a support portion that supports the connecting portion, wherein themovable portion is so shaped that the length thereof parallel to theswing axis decreases stepwise with distance from the swing axis in aplan view.
 11. An image forming apparatus comprising: a light sourcethat emits light; and an optical scanner that deflects light from thelight source, wherein the optical scanner includes a movable portionthat includes a light reflector having light reflectivity and swingsabout a swing axis, a connecting portion that extends from the movableportion and torsionally deforms in response to the swinging of themovable portion, and a support portion that supports the connectingportion, the movable portion is so shaped that the length thereofparallel to the swing axis decreases stepwise with distance from theswing axis in a plan view.